HRZ, High Performance Specialty Chiller, Fluorinated Coolant Type

HRZ, High Performance Specialty Chiller, Fluorinated Coolant Type

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

  • Cooling capacities: 1kW, 2kW, 4kW, 8kW
  • Temperature range setting: -20 to 40°C, 20 to 90°C, -20 to 90°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
  • Circulating fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
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  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.